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Reactive ion etching (RIE) techniques for micromachining applications
Y.X. Li, M.R. Wolffenbuttel, P.J. French, M. Laros, P.M. Sarro, R.F. WolffenbuttelVolume:
41
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0924-4247(94)80130-4
File:
PDF, 1.07 MB
english, 1994