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New applications of r.f.-sputtered glass films as protection and bonding layers in silicon micromachining
J.W. Berenschot, J.G.E. Gardeniers, T.S.J. Lammerink, M. ElwenspoekVolume:
41
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0924-4247(94)80134-7
File:
PDF, 1.28 MB
english, 1994