Three-dimensional silicon electrostatic linear...

Sensors and Actuators A: Physical 1995 Vol. 48; Iss. 2

Three-dimensional silicon electrostatic linear microactuator

N. Tirole, D. Hauden, P. Blind, M. Froelicher, L. Gaudriot
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Volume:
48
Year:
1995
Pages:
6
DOI:
10.1016/0924-4247(95)00991-4
File:
PDF, 486 KB
1995
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