Silicon anisotropic etching in KOH-isopropanol etchant

Silicon anisotropic etching in KOH-isopropanol etchant

Irena Barycka, Irena Zubel
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Volume:
48
Year:
1995
Pages:
10
DOI:
10.1016/0924-4247(95)00992-2
File:
PDF, 1.29 MB
1995
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