![](/img/cover-not-exists.png)
Selective etching of silicon in aqueous ammonia solution
Lai-Cheng Chen, Minjan Chen, Tay-Her Tsaur, Chenhsin Lien, Chi-Chao WanVolume:
49
Year:
1995
Pages:
7
DOI:
10.1016/0924-4247(95)01007-n
File:
PDF, 842 KB
1995