Plasma dynamics in a discharge produced by a pulsed dual...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2014 / 11 Vol. 32; Iss. 6

Plasma dynamics in a discharge produced by a pulsed dual frequency inductively coupled plasma source

Mishra, Anurag, Lee, Sehan, Yeom, Geun Y.
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4897914
Date:
November, 2014
File:
PDF, 1.17 MB
english, 2014
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