Dynamics of polysilicon parallel-plate electrostatic actuators
Patrick B. Chu, Phyllis R. Nelson, Mark L. Tachiki, Kristofer S.J. PisterVolume:
52
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0924-4247(96)80152-x
File:
PDF, 585 KB
english, 1996