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A simple fabrication process for polysilicon side-drive micromotors
Deng, K., Mehregany, M., Dewa, A.S.Volume:
3
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.338633
Date:
January, 1994
File:
PDF, 1.31 MB
english, 1994