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[IEEE Conference on Electron Devices, 2005 Spanish - Tarragona, Spain (2-4 Feb. 2005)] Conference on Electron Devices, 2005 Spanish - FEM simulations to estimate the polymer thickness deposited over mechanical resonators
Morata, M., Garcia, M., Santos, J.P., Sayago, T., Fernandez, M.J., Horrillo, M.C., Figueras, E., Fonseca, L., Santander, J., Gracia, I., Cane, C.Year:
2005
Language:
english
DOI:
10.1109/sced.2005.1504509
File:
PDF, 500 KB
english, 2005