Threshold Voltage Variations Due to Oblique Single Grain Boundary in Sub-50-nm Polysilicon Channel
Kim, Jungsik, Rim, Taiuk, Lee, Junyoung, Baek, Chang-Ki, Meyyappan, Meyya, Lee, Jeong-SooVolume:
61
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2014.2329848
Date:
August, 2014
File:
PDF, 1.90 MB
english, 2014