Iridium oxide as actuator material for the ISFET-based sensor-actuator system
W. Olthuis, J.G. Bomer, P. Bergveld, M. Bos, W.E. van der LindenVolume:
5
Year:
1991
Language:
english
Pages:
6
DOI:
10.1016/0925-4005(91)80218-9
File:
PDF, 508 KB
english, 1991