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Fabrication and modelling of CMOS microbridge gas-flow sensors
D. Moser, R. Lenggenhager, G. Wachutka, H. BaltesVolume:
6
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0925-4005(92)80050-8
File:
PDF, 900 KB
english, 1992