Nitridation of GaAs surfaces using nitrogen through a hot...

Nitridation of GaAs surfaces using nitrogen through a hot tungsten filament

Makimoto, Toshiki, Kobayashi, Naoki
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Volume:
67
Year:
1995
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.115184
File:
PDF, 322 KB
english, 1995
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