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A silicon-based SAW chemical sensor for NO2 by applying a silicon nitride passivation layer
M.S. Nieuwenhuizen, A.J. NederlofVolume:
9
Year:
1992
Language:
english
Pages:
6
DOI:
10.1016/0925-4005(92)80212-g
File:
PDF, 586 KB
english, 1992