Observation of radio-frequency discharges at various...

Journal of Applied Physics 1993 Vol. 73; Iss. 5

Observation of radio-frequency discharges at various driving frequencies

Ohtsu, Yasunori, Okuno, Yoshihiro, Fujita, Hiroharu
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Volume:
73
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.353116
File:
PDF, 826 KB
english, 1993
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