Effect of total hydrogen content in silicon nitride...

Sensors and Actuators B: Chemical 1993 Vol. 12; Iss. 1

Effect of total hydrogen content in silicon nitride sensitive film on performance of ISFET

Keming Chen, Guohua Li, Huiyun Lu, Langxing Chen
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Volume:
12
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0925-4005(93)85007-w
File:
PDF, 418 KB
english, 1993
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