Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 4
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Crystallinity-retaining removal of germanium by direct-write focused electron beam induced etching
Roediger, Peter, Wanzenboeck, Heinz D., Hochleitner, Gottfried, Bertagnolli, EmmerichVolume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3596563
File:
PDF, 964 KB
english, 2011