Sputtering ion source with simultaneous use of microwave and Penning-ionization-gauge discharge
Yoshida, Yoshikazu, Ohnishi, Teruhito, Hirofuji, Yuichi, Ikeda, TanejiroVolume:
61
Year:
1990
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1141929
File:
PDF, 511 KB
english, 1990