Nanoscratch testing of atomic layer deposition and...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2012 Vol. 30; Iss. 1

Nanoscratch testing of atomic layer deposition and magnetron sputtered TiO2 and Al2O3 coatings on polymeric substrates

Kääriäinen, Tommi O., Kelly, Peter J., Cameron, David C., Beake, Ben, Li, Heqing, Barker, Paul M., Struller, Carolin F.
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3665418
File:
PDF, 1.01 MB
english, 2012
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