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Electrostatically excited and capacitively detected flexural plate waves on thin silicon nitride membranes with chemical sensor applications
T. Giesler, J.-U. MeyerVolume:
18
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0925-4005(94)87066-7
File:
PDF, 337 KB
english, 1994