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Sacrificial wafer bonding for planarization after very deep etching
Spiering, V.L., Berenschot, J.W., Elwenspoek, M., Fluitman, J.H.J.Volume:
4
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.465120
Date:
January, 1995
File:
PDF, 1.09 MB
english, 1995