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Experimental investigation and numerical modeling of the thermal behavior of a micro-heater
Lemeunier, Franck, Allanic, Nadine, Belhabib, Sofiane, Mousseau, Pierre, Plot, ChristopheVolume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2373-7
Date:
January, 2016
File:
PDF, 1.14 MB
english, 2016