Selective nanoscale growth of titanium on the Si(001)...

Journal of Applied Physics 1999 Vol. 86; Iss. 3

Selective nanoscale growth of titanium on the Si(001) surface using an atomic hydrogen resist

Mitsui, Toshiyuki, Curtis, Rob, Ganz, Eric
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Volume:
86
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.370946
File:
PDF, 416 KB
english, 1999
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