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Negative cesium sputter ion source for generating cluster primary ion beams for secondary ion mass spectrometry analysis
Gillen, Greg, King, Lance, Freibaum, Brian, Lareau, Richard, Bennett, Joe, Chmara, FrankVolume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1340651
File:
PDF, 573 KB
english, 2001