Range profiles of 6–16‐keV hydrogen ions implanted in metal...

Journal of Applied Physics 1976 / 04 Vol. 47; Iss. 4

Range profiles of 6–16‐keV hydrogen ions implanted in metal oxides

Bo/ttiger, J., Leslie, J. R., Rud, N.
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Volume:
47
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.322791
Date:
April, 1976
File:
PDF, 525 KB
english, 1976
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