![](/img/cover-not-exists.png)
[IEEE 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (MEMS/MOEMS) - Nice, France (2008.04.9-2008.04.11)] 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Measurement of large forces and deflections in microstructures
Hals, Kai Axel, Halvorsen, Einar, Xuyuan Chen,Year:
2008
Language:
english
DOI:
10.1109/dtip.2008.4753014
File:
PDF, 4.51 MB
english, 2008