![](/img/cover-not-exists.png)
Leakage Current and Dielectric Properties of Integrated Ferroelectric Capacitor Etched in Non-Crystalline Phase
Wang, Longhai, Tian, Bin, Zou, Lianying, Cheng, Hao, Huang, Danxia, Dai, Ying, Yang, LeiVolume:
132
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584587.2012.660833
Date:
January, 2012
File:
PDF, 730 KB
english, 2012