Growth of poly- and single-crystal ScN on MgO(001): Role of low-energy N[sub 2][sup +] irradiation in determining texture, microstructure evolution, and mechanical properties
Gall, D., Petrov, I., Hellgren, N., Hultman, L., Sundgren, J. E., Greene, J. E.Volume:
84
Year:
1998
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.368913
File:
PDF, 793 KB
english, 1998