Synthesis, composition, surface roughness and mechanical properties of thin nitrogenated carbon films
Chan, Wai-ChungVolume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581194
Date:
May, 1998
File:
PDF, 1.46 MB
english, 1998