Formation of polytetrafluoroethylene thin films by using...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1996 / 7 Vol. 14; Iss. 4

Formation of polytetrafluoroethylene thin films by using CO2 laser evaporation and XeCl laser ablation

Inayoshi, Muneto
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Volume:
14
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.580071
Date:
July, 1996
File:
PDF, 796 KB
english, 1996
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