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The role of chlorinated surface films in excimer laser etching of Cu at low Cl2 pressures
Baller, T. S.Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575715
Date:
May, 1988
File:
PDF, 713 KB
english, 1988