Magnetic condensation of a photoexcited plasma during...

Magnetic condensation of a photoexcited plasma during fluoropolymer sputtering

Sugimoto, Iwao, Miyake, Shojiro
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Volume:
67
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.345568
File:
PDF, 785 KB
english, 1990
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