Effect of frequency in the deposition of microcrystalline silicon from silane discharges
Amanatides, E., Mataras, D., Rapakoulias, D. E.Volume:
90
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1413240
File:
PDF, 368 KB
english, 2001