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Effect of rapid thermal annealing temperature on the formation of CoSi studied by x-ray photoelectron spectroscopy and micro-Raman spectroscopy
Zhao, Jin, Ballast, Lynette K., Hossain, Tim Z., Trostel, Rebecca E., Bridgman, William C.Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.582408
File:
PDF, 339 KB
english, 2000