Evolution of hydrogen and helium co-implanted...

Journal of Applied Physics 2001 Vol. 90; Iss. 8

Evolution of hydrogen and helium co-implanted single-crystal silicon during annealing

Duo, Xinzhong, Liu, Weili, Zhang, Miao, Wang, Lianwei, Lin, Chenglu, Okuyama, M., Noda, M., Cheung, Wing-Yiu, Wong, S. P., Chu, Paul K., Hu, Peigang, Wang, S. X., Wang, L. M.
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Volume:
90
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1389478
File:
PDF, 512 KB
english, 2001
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