![](/img/cover-not-exists.png)
Strain mapping for advanced CMOS technologies
Özdöl, V. B., Tyutyunnikov, D., Koch, C. T., van Aken, P. A.Volume:
49
Language:
english
Journal:
Crystal Research and Technology
DOI:
10.1002/crat.201300226
Date:
January, 2014
File:
PDF, 1.42 MB
english, 2014