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[IEEE International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - Stockholm, Sweden (June 25-29, 1995)] Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - Fabrication And Characterization Of A Silicon Capacitive Structure For Simultaneous Detection Of Acceleration And Angular Rate
Mizuno, J., Nottineyer, K., Cabuz, C., Kobayashi, T., Esashi, M.Volume:
2
Year:
1995
Language:
english
DOI:
10.1109/sensor.1995.721923
File:
PDF, 375 KB
english, 1995