[IEEE 2010 23rd International Vacuum Nanoelectronics Conference (IVNC) - Palo Alto, CA, USA (2010.07.26-2010.07.30)] International Vacuum Nanoelectronics Conference - 6.2: A multi-gated FEA for low energy acceleration micro-column microscopes
Koike, Akifumi, Tagami, Tomoya, Takagi, Yasuo, Fujino, Takahiro, Aoki, Toru, Neo, Yoichiro, Mimura, Hidenori, Nagao, Masayoshi, Yoshida, Tomoya, Murata, Hidekazu, Sakai, KentaroYear:
2010
Language:
english
DOI:
10.1109/ivnc.2010.5563206
File:
PDF, 245 KB
english, 2010