Deuterium interactions with ion-implanted SiO2 layers in silicon
Myers, S. M., Brown, G. A., Revesz, A. G., Hughes, H. L.Volume:
73
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.353122
File:
PDF, 1.61 MB
english, 1993