Comparative study of a-C:H films for inertial confinement fusion prepared with various hydrocarbon precursors by radio frequency-plasma enhanced chemical vapor deposition
Theobald, M., Durand, J., Baclet, P., Legaie, O.Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.582147
File:
PDF, 667 KB
english, 2000