Microbridge testing of plasma-enhanced chemical-vapor deposited silicon oxide films on silicon wafers
Cao, Zhiqiang, Zhang, Tong-Yi, Zhang, XinVolume:
97
Année:
2005
Langue:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1898449
Fichier:
PDF, 526 KB
english, 2005