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Zone-averaged method to minimize polarizer and analyzer imperfections in a phase-modulated spectroscopic ellipsometer
You, Chun-Yeol, Shin, Sung-ChulVolume:
68
Year:
1997
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1148316
File:
PDF, 352 KB
english, 1997