[IEEE Infrared and Millimeter Waves, Conference Digest of...

[IEEE Infrared and Millimeter Waves, Conference Digest of the 2004 Joint 29th International Conference on 2004 and 12th International Conference on Terahertz Electronics, 2004. - Karlsruhe, Germany (Sept. 27 - Oct. 1, 2004)] Infrared and Millimeter Waves, Conference Digest of the 2004 Joint 29th International Conference on 2004 and 12th International Conference on Terahertz Electronics, 2004. - On investigation of impurities of tetrafluorosilane by microwave gas spectroscopy method

Vaks, V.L., Cheroyaeva, M.B., Klyueva, N.V., Domracheva, E.G., Sennikov, P.G., Chuprov, L.A.

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Year:

2004

Language:

english

DOI:

10.1109/icimw.2004.1422121

File:

PDF, 134 KB

english, 2004

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