Structure of surface layers of silicon heavily implanted with Ar
Ohdomari, Iwao, Ikeda, Masahiro, Ohno, Kohsuke, Itoh, TadatsuguVolume:
46
Year:
1975
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.321308
File:
PDF, 483 KB
english, 1975