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Diamond-Like Carbon Films Formed by Pulsed Supersonic Plasma Flow Deposition
Nastaushev, Yuri V., Gavrilova, Tatiana A., Fedosenko, Evgenij V., Pozdnyakov, George A., Dultsev, Fedor N.Volume:
213
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.213.137
Date:
March, 2014
File:
PDF, 2.26 MB
english, 2014