Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1990 / 5 Vol. 8; Iss. 3
![](/img/cover-not-exists.png)
Tightly bound H2O in spin-on-glass
Tompkins, Harland G.Volume:
8
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.585009
Date:
May, 1990
File:
PDF, 634 KB
english, 1990