Thermal-mechanical modeling of nodular defect embedded within multilayer coatings
Ling, Xiulan, Shao, Jianda, Fan, ZhengxiuVolume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3065676
File:
PDF, 697 KB
english, 2009