Advanced Oxidation Processes in the Removal of Organics From Silicon Surfaces in IC Manufacturing: Theoretical Concepts
Smedt, F. De, Vankerckhoven, H., Vinckier, C.Volume:
25
Language:
english
Journal:
Ozone: Science & Engineering
DOI:
10.1080/01919510390481766
Date:
October, 2003
File:
PDF, 448 KB
english, 2003