Reactive synthesis of well-oriented zinc-oxide films by means of the facing targets sputtering method
Matsuoka, Morito, Hoshi, Yoichi, Naoe, MasahikoVolume:
63
Year:
1988
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.341116
File:
PDF, 830 KB
english, 1988