Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2010 Vol. 28; Iss. 6
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Controlled sacrificial sidewall surface micromachining for the release of high length-to-thickness aspect ratio bridges
Raum, Christopher R., Tait, R. Niall, Gauthier, RobertVolume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3503612
File:
PDF, 868 KB
english, 2010